검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Transition-Metal Cleaning Using Thermal Beams Chang JP, Zhang Z, Xu H, Sawin HH, Butterbaugh JW Journal of Vacuum Science & Technology A, 15(6), 2959, 1997 |
| 2 |
Photochemical Dry-Etching of Doped and Undoped Silicon-Oxides Gray DC, Butterbaugh JW, Hiatt CF, Lawing AS, Sawin HH Journal of the Electrochemical Society, 142(11), 3859, 1995 |
| 3 |
Photochemical Dry Stripping of Silicon-Nitride Films Gray DC, Butterbaugh JW, Hiatt CF, Lawing AS, Sawin HH Journal of the Electrochemical Society, 142(11), 3919, 1995 |