검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Near-surface secondary-ion-mass-spectrometry analyses of plasma-based B ion implants in Si Buyuklimanli TH, Magee CW, Marino JW, Walther SR Journal of Vacuum Science & Technology B, 24(1), 408, 2006 |
| 2 |
Improved near surface characterization of shallow arsenic distribution by SIMS depth profiling Buyuklimanli TH, Marino JW, Novak SW Applied Surface Science, 231-2, 636, 2004 |
| 3 |
High-resolution depth profiling of ultrashallow boron implants in silicon using high-resolution RBS Kimura K, Oota Y, Nakajima K, Buyuklimanli TH Current Applied Physics, 3(1), 9, 2003 |