검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Energy distribution of ions bombarding biased electrodes in high density plasma reactors Edelberg EA, Perry A, Benjamin N, Aydil ES Journal of Vacuum Science & Technology A, 17(2), 506, 1999 |
| 2 |
Electrical optimization of plasma-enhanced chemical vapor deposition chamber cleaning plasmas Sobolewski MA, Langan JG, Felker BS Journal of Vacuum Science & Technology B, 16(1), 173, 1998 |
| 3 |
Radio-Frequency Diagnostics for Plasma Etch Systems Bushman S, Edgar TF, Trachtenberg I Journal of the Electrochemical Society, 144(2), 721, 1997 |