검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Etching properties of ZnS thin films in Cl-2/CF4/Ar plasma Kim DP, Kim CI, Kwon KH Thin Solid Films, 459(1-2), 131, 2004 |
| 2 |
The etching characteristics of YMnO3 thin films in high density Ar/C-4 plasma Kim DP, Kim CI Thin Solid Films, 434(1-2), 130, 2003 |