검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Electron-beam excited plasma etching reactor with polyimide interface film Morita S, Phatak GJ, Mori Y Thin Solid Films, 386(2), 142, 2001 |
| No. | Article |
|---|---|
| 1 |
Electron-beam excited plasma etching reactor with polyimide interface film Morita S, Phatak GJ, Mori Y Thin Solid Films, 386(2), 142, 2001 |