검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Etch characteristics of FePt magnetic thin films using inductively coupled plasma reactive ion etching Kim EH, Bin Xiao Y, Kong SM, Chung CW Thin Solid Films, 519(23), 8223, 2011 |
| No. | Article |
|---|---|
| 1 |
Etch characteristics of FePt magnetic thin films using inductively coupled plasma reactive ion etching Kim EH, Bin Xiao Y, Kong SM, Chung CW Thin Solid Films, 519(23), 8223, 2011 |