검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Channeled implants in 6H silicon carbide Janson MS, Hallen A, Godignon P, Kuznetsov AY, Linnarsson MK, Morvan E, Svensson BG Materials Science Forum, 338-3, 889, 2000 |
| 2 |
Modeling of Damage Accumulation During Ion-Implantation into Single-Crystalline Silicon Posselt M, Schmidt B, Murthy CS, Feudel T, Suzuki K Journal of the Electrochemical Society, 144(4), 1495, 1997 |