화학공학소재연구정보센터
검색결과 : 5건
No. Article
1 Study of the reaction mechanism of aluminum based composite fuel and chlorine trifluoride oxide
Liu XH, Ma Y, Li SY, Yan H, Wang DX, Luo YF
Energy, 168, 393, 2019
2 Environmental and health risks of chlorine trifluoride (ClF3), an alternative to potent greenhouse gases in the semiconductor industry
Tsai WT
Journal of Hazardous Materials, 190(1-3), 1, 2011
3 Honeycomb-textured structures on crystalline silicon surfaces for solar cells by spontaneous dry etching with chlorine trifluoride gas
Saito Y, Kosuge T
Solar Energy Materials and Solar Cells, 91(19), 1800, 2007
4 A study on the reaction between chlorine trifluoride gas and glass-like carbon
Saito Y, Nishizawa T, Hamaguchi M
Applied Surface Science, 240(1-4), 381, 2005
5 Transition-Metal Cleaning Using Thermal Beams
Chang JP, Zhang Z, Xu H, Sawin HH, Butterbaugh JW
Journal of Vacuum Science & Technology A, 15(6), 2959, 1997