검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Tantalum Metallization Using an Electron-Cyclotron-Resonance Plasma Source Coupled with Divided Microwaves Nishimura H, Ono T, Oda M, Matsuo S Journal of Vacuum Science & Technology A, 15(3), 707, 1997 |
| 2 |
SiC X-Ray-Lithography Mask Fabricated by Electron-Cyclotron-Resonance Plasma Source Coupled with Divided Microwaves Shimada M, Ono T, Okada I, Matsuo S Journal of Vacuum Science & Technology B, 15(3), 736, 1997 |