검색결과 : 6건
| No. | Article |
|---|---|
| 1 |
Surface morphology and reaction at Cu/Si interface - Effect of native silicon suboxide Benouattas N, Mosser A, Bouabellou A Applied Surface Science, 252(20), 7572, 2006 |
| 2 |
Formation of copper silicides by high dose metal vapor vacuum arc ion implantation Rong C, Zhang JH, Li WZ Applied Surface Science, 220(1-4), 40, 2003 |
| 3 |
Diffusion barrier performance of thin Cr films in the Cu/Cr/Si structure Ezer Y, Harkonen J, Sokolov V, Saarilahti J, Kaitila J, Kuivalainen P Materials Research Bulletin, 33(9), 1331, 1998 |
| 4 |
TiW(N) as Diffusion-Barriers Between Cu and Si Chiou JC, Juang KC, Chen MC Journal of the Electrochemical Society, 142(7), 2326, 1995 |
| 5 |
Room-Temperature Oxidation of Silicon in the Presence of Cu3Si Liu CS, Chen LJ Thin Solid Films, 262(1-2), 187, 1995 |
| 6 |
Thermal-Stability of Cu/CoSi2 Contacted P+n Shallow Junction with and Without TiW Diffusion Barrier Chiou JC, Chen MC Journal of the Electrochemical Society, 141(10), 2804, 1994 |