검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Effect of fluorine on surface morphology in selective epitaxial TiSi2 growth by plasma-enhanced chemical vapor deposition Saito K, Arita Y Journal of the Electrochemical Society, 145(5), 1640, 1998 |
| 2 |
Structural study of YSi1.7 layers formed by channeled ion beam synthesis Wu MF, Yao SD, Vantomme A, Hogg S, Pattyn H, Langouche G, Yang QQ, Wang QM Journal of Vacuum Science & Technology B, 16(4), 1901, 1998 |
| 3 |
In-Situ Ballistic-Carrier Spectroscopy on Epitaxial CoSi2/Si(111) and Si(100) Sirringhaus H, Lee EY, Kafader U, Vonkanel H Journal of Vacuum Science & Technology B, 13(4), 1848, 1995 |
| 4 |
Characterization of Buried Cobalt Silicide Layers in Si by MEVVA Implantation Peng QC, Wong SP, Wilson IH, Wang N, Fung KK Thin Solid Films, 270(1-2), 573, 1995 |