검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Kinetics of Power Deposition and Silane Dissociation in Radiofrequency Discharges Spiliopoulos N, Mataras D, Rapakoulias DE Journal of the Electrochemical Society, 144(2), 634, 1997 |
| 2 |
Sheath Impedance Effects in Very High-Frequency Plasma-Experiments Schwarzenbach W, Howling AA, Fivaz M, Brunner S, Hollenstein C Journal of Vacuum Science & Technology A, 14(1), 132, 1996 |