검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Barrier capabilities of selective chemical vapor deposited W films and WSiN/WSix/W stacked layers against Cu diffusion Wang MT, Chen LJ, Chen MC Journal of the Electrochemical Society, 146(2), 728, 1999 |
| No. | Article |
|---|---|
| 1 |
Barrier capabilities of selective chemical vapor deposited W films and WSiN/WSix/W stacked layers against Cu diffusion Wang MT, Chen LJ, Chen MC Journal of the Electrochemical Society, 146(2), 728, 1999 |