검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
In situ optical spectroscopy during deposition of Ag:Si3N4 nanocomposite films by magnetron sputtering Simonot L, Babonneau D, Camelio S, Lantiat D, Guerin P, Lamongie B, Antad V Thin Solid Films, 518(10), 2637, 2010 |
| 2 |
Correlations between the microstructure of Ag-Si3N4 multilayers and their optical properties Girardeau T, Camelio S, Babonneau D, Toudert J, Barranco A Thin Solid Films, 455-56, 313, 2004 |
| 3 |
Plasma-enhanced chemical vapor deposition of SiO2 from a Si(CH3)(3)Cl precursor and mixtures Ar/O-2 as plasma gas Barranco A, Cotrino J, Yubero F, Girardeau T, Camelio S, Clerc C, Gonzalez-Elipe AR Journal of Vacuum Science & Technology A, 21(4), 900, 2003 |