검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Textured hexagonal and cubic phases of AlN films deposited on Si (100) by DC magnetron sputtering and high power impulse magnetron sputtering Riah B, Ayad A, Camus J, Rammal M, Boukari F, Chekour L, Djouadi MA, Rouag N Thin Solid Films, 655, 34, 2018 |
| 2 |
Comparison of the structural properties and residual stress of AlN films deposited by dc magnetron sputtering and high power impulse magnetron sputtering at different working pressures Aissa KA, Achour A, Camus J, Le Brizoual L, Jouan PY, Djouadi MA Thin Solid Films, 550, 264, 2014 |