검색결과 : 10건
| No. | Article |
|---|---|
| 1 |
Mechanismand model of atomic hydrogen cleaning for different types of carbon contamination on extreme ultraviolet multilayers Song Y, Lu QP, Gong XP Thin Solid Films, 612, 96, 2016 |
| 2 |
Electron beam influence on the carbon contamination of electron irradiated hydroxyapatite thin films Hristu R, Stanciu SG, Tranca DE, Stanciu GA Applied Surface Science, 346, 342, 2015 |
| 3 |
The effect of carbon contamination and argon ion sputtering on the work function of chlorinated indium tin oxide Whitcher TJ, Yeoh KH, Chua CL, Woon KL, Chanlek N, Nakajima H, Saisopa T, Songsiriritthigul P Current Applied Physics, 14(3), 472, 2014 |
| 4 |
Cleaning of carbon layer from the gold films using a pulsed Nd:YAG laser Singh A, Choubey A, Modi MH, Upadhyaya BN, Oak SM, Lodha GS, Deb SK Applied Surface Science, 283, 612, 2013 |
| 5 |
Role of cleaning methods on bond quality of Ti coated glass/imidex system Lubna N, Auner G, Patwa R, Herfurth H, Newaz G Applied Surface Science, 257(10), 4749, 2011 |
| 6 |
In situ ellipsometry study of atomic hydrogen etching of extreme ultraviolet induced carbon layers Chen JQ, Louis E, Harmsen R, Tsarfati T, Wormeester H, van Kampen M, van Schaik W, van de Kruijs R, Bijkerk F Applied Surface Science, 258(1), 7, 2011 |
| 7 |
Carbon contamination of EUV mask and its effect on CD performance Lee S, Doh JG, Lee JU, Lee I, Jeong CY, Lee DG, Rah SY, Ahn J Current Applied Physics, 11(4), S107, 2011 |
| 8 |
Secondary electron yield measurements of carbon covered multilayer optics Chen JQ, Louis E, Verhoeven J, Harmsen R, Lee CJ, Lubomska M, van Kampen M, van Schaik W, Bijkerk F Applied Surface Science, 257(2), 354, 2010 |
| 9 |
High growth rate metal organic vapor phase epitaxy GaN Matsumoto K, Tokunaga H, Ubukata A, Ikenaga K, Fukuda Y, Tabuchi T, Kitamura Y, Koseki S, Yamaguchi A, Uematsu K Journal of Crystal Growth, 310(17), 3950, 2008 |
| 10 |
Review of Secondary-Ion Mass-Spectrometry Characterization of Contamination Associated with Ion-Implantation Stevie FA, Wilson RG, Simons DS, Current MI, Zalm PC Journal of Vacuum Science & Technology B, 12(4), 2263, 1994 |