검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Chemical vapour deposition of polycrystalline A1N films from AlCl3-NH3 mixtures. Analysis and modelling of transport phenomena Dollet A, Casaux Y, Chaix G, Dupuy C Thin Solid Films, 406(1-2), 1, 2002 |
| 2 |
Chemical vapour deposition of polycrystalline AlN films from AlCl3-NH3 mixtures: II - surface morphology and mechanisms of preferential orientation at low-pressure Dollet A, Casaux Y, Matecki M, Rodriguez-Clemente R Thin Solid Films, 406(1-2), 118, 2002 |