검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Methods of producing plasma enhanced chemical vapor deposition silicon nitride thin films with high compressive and tensile stress Belyansky M, Chace M, Gluschenkov O, Kempisty J, Klymko N, Madan A, Mallikarjunan A, Molis S, Ronsheim P, Wang Y, Yang D, Li Y Journal of Vacuum Science & Technology A, 26(3), 517, 2008 |