검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Effect of HCl on the SiGe growth kinetics in reduced pressure-chemical vapor deposition Hartmann JM, Champay F, Loup V, Rolland G, Semeria MN Journal of Crystal Growth, 241(1-2), 93, 2002 |
| No. | Article |
|---|---|
| 1 |
Effect of HCl on the SiGe growth kinetics in reduced pressure-chemical vapor deposition Hartmann JM, Champay F, Loup V, Rolland G, Semeria MN Journal of Crystal Growth, 241(1-2), 93, 2002 |