검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Wafer level microarcing model in 90 nm chemical-vapor deposition low-k via etch on 300 mm silicon-on-insulator substrate Cong H, Low CH, Pradeep YR, Zhang X, Chandima P, Liu WP, Tan JB, Hsia LC Journal of Vacuum Science & Technology A, 24(4), 1404, 2006 |