검색결과 : 2건
No. | Article |
---|---|
1 |
Characterization and modeling of a Helicon plasma source Cheetham AD, Rayner JP Journal of Vacuum Science & Technology A, 16(5), 2777, 1998 |
2 |
Radio-Frequency Matching for Helicon Plasma Sources Rayner JP, Cheetham AD, French GN Journal of Vacuum Science & Technology A, 14(4), 2048, 1996 |