화학공학소재연구정보센터
검색결과 : 4건
No. Article
1 Structural and electronic properties of in-situ phosphorous-doped Ge layers grown by reduced pressure-chemical vapour deposition
Hartmann JM, Benevent V, Reboud V, Chelnokov A, Guilloy K, Pauc N, Calvo V
Thin Solid Films, 602, 13, 2016
2 Study of the light emission in Ge layers and strained membranes on Si substrates
Gassenq A, Guilloy K, Pauc N, Hartmann JM, Dias GO, Rouchon D, Tardif S, Escalante J, Duchemin I, Niquet YM, Chelnokov A, Reboud V, Calvo V
Thin Solid Films, 613, 64, 2016
3 Fabrication of three-dimensional photonic structures with submicrometer resolution by x-ray lithography
Cuisin C, Chelnokov A, Lourtioz JM, Decanini D, Chen Y
Journal of Vacuum Science & Technology B, 18(6), 3505, 2000
4 Fabrication of three-dimensional microstructures by high resolution x-ray lithography
Cuisin C, Chen Y, Decanini D, Chelnokov A, Carcenac F, Madouri A, Lourtioz JM, Launois H
Journal of Vacuum Science & Technology B, 17(6), 3444, 1999