검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Hydrogen plasma etching of silicon dioxide in a hollow cathode system Pena O, Muhl S, Lopez W, Rodriguez-Fernandez L, Ruvalcaba-Sil JL Thin Solid Films, 518(12), 3156, 2010 |
| No. | Article |
|---|---|
| 1 |
Hydrogen plasma etching of silicon dioxide in a hollow cathode system Pena O, Muhl S, Lopez W, Rodriguez-Fernandez L, Ruvalcaba-Sil JL Thin Solid Films, 518(12), 3156, 2010 |