검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Nitridation-Retarded Diffusion of Phosphorus in (100)Silicon Chen NK, Lee C Journal of the Electrochemical Society, 143(1), 352, 1996 |
| 2 |
Oxynitridation-Enhanced Diffusion of Phosphorus in (100) Silicon Chen NK, Lee C Journal of the Electrochemical Society, 142(6), 2051, 1995 |