검색결과 : 14건
| No. | Article |
|---|---|
| 1 |
Work Function Tuning of TixSiyNz Electrodes Using Partial Saturation of Chemisorbing Surface during Pulsing Chemical Vapor Deposition Fillot F, Maitrejean S, Pierre F, Chenevier B Electrochemical and Solid State Letters, 12(7), H272, 2009 |
| 2 |
Poly-Si/TiN/HfO2 gate stack etching in high-density plasmas Le Gouil A, Joubert O, Cunge G, Chevolleau T, Vallier L, Chenevier B, Matko I Journal of Vacuum Science & Technology B, 25(3), 767, 2007 |
| 3 |
Perimeter crystallization of amorphous silicon around a germanium seed Hakim MMA, Matko I, Chenevier B, Ashburn P Electrochemical and Solid State Letters, 9(7), G236, 2006 |
| 4 |
Nanometer-scale period Sc/Cr multilayer mirrors and their thermal stability Majkova E, Chushkin Y, Jergel M, Luby S, Holy V, Matko I, Chenevier B, Toth L, Hatano T, Yamamoto M Thin Solid Films, 497(1-2), 115, 2006 |
| 5 |
Metal bonding in SiC based substrates Matko I, Chenevier B, Madar R, Roussel H, Coindeau S, Letertre F, Richtarch C, Di Cioccio L Materials Science Forum, 483, 781, 2005 |
| 6 |
Crystal growth of 3C-SiC polytype on 6H-SiC(0001) substrate Diani M, Simon L, Kubler L, Aubel D, Matko I, Chenevier B, Madar R, Audier M Journal of Crystal Growth, 235(1-4), 95, 2002 |
| 7 |
Pt doping of SnO2 thin films - A transmission electron microscopy analysis of the porosity evolution Matko I, Gaidi M, Chenevier B, Charai A, Saikaly W, Labeau M Journal of the Electrochemical Society, 149(8), H153, 2002 |
| 8 |
QuaSiC Smart-Cut (R) substrates for SiC high power devices Letertre F, Jalaguier E, Di Cioccio L, Templier F, Bluet JM, Banc C, Matko I, Chenevier B, Bano E, Guillot G, Billon T, Aspar B, Madar R, Ghyselen B Materials Science Forum, 389-3, 151, 2002 |
| 9 |
3C-SiC Growth on 6H-SiC (0001) substrates Matko I, Chenevier B, Audier M, Madar R, Diani M, Simon L, Kubler L, Aubel D Materials Science Forum, 389-3, 315, 2002 |
| 10 |
TEM analysis of an additional metal-rich component at the C49-C54 transformation in Ti/Si thin films capped with TiN Matko I, Chenevier B, Chaix-Pluchery O, Madar R, La Via F Thin Solid Films, 408(1-2), 123, 2002 |