검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Effects of gas distribution on polysilicon etch rate uniformity for a low pressure, high density plasma Khater MH, Overzet LJ, Cherrington BE Journal of Vacuum Science & Technology B, 16(2), 490, 1998 |
| No. | Article |
|---|---|
| 1 |
Effects of gas distribution on polysilicon etch rate uniformity for a low pressure, high density plasma Khater MH, Overzet LJ, Cherrington BE Journal of Vacuum Science & Technology B, 16(2), 490, 1998 |