검색결과 : 5건
| No. | Article |
|---|---|
| 1 |
Combined Impurity Gettering Effects of Helium-Induced Cavities and Oxygen Precipitates Created by Plasma Immersion Ion-Implantation Min J, Chu PK, Lu X, Iyer SS, Cheung NW Thin Solid Films, 300(1-2), 64, 1997 |
| 2 |
Modeling of Leakage Mechanisms in Sub-50 nm P(+)-N Junctions Jones EC, Cheung NW Journal of Vacuum Science & Technology B, 14(1), 236, 1996 |
| 3 |
Modeling of Oxide Charging Effects in Plasma Processing En W, Linder BP, Cheung NW Journal of Vacuum Science & Technology B, 14(1), 552, 1996 |
| 4 |
Analytical Modeling of Plasma Immersion Ion-Implantation Target Current Using the Spice Circuit Simulator En W, Cheung NW Journal of Vacuum Science & Technology B, 12(2), 833, 1994 |
| 5 |
Anomalous Behavior of Shallow BF3 Plasma Immersion Ion-Implantation Jones EC, En W, Ogawa S, Fraser DB, Cheung NW Journal of Vacuum Science & Technology B, 12(2), 956, 1994 |