검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Etch mechanisms of hybrid low-k material (SiOCH with porogen) in fluorocarbon based plasma Eon D, Damon M, Chevolleaua T, David T, Vallier L, Joubert O Journal of Vacuum Science & Technology B, 25(3), 715, 2007 |
| No. | Article |
|---|---|
| 1 |
Etch mechanisms of hybrid low-k material (SiOCH with porogen) in fluorocarbon based plasma Eon D, Damon M, Chevolleaua T, David T, Vallier L, Joubert O Journal of Vacuum Science & Technology B, 25(3), 715, 2007 |