검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Compact electrostatic lithography column for nanoscale exposure Chisholm T, Liu HN, Munro E, Rouse J, Zhu XQ Journal of Vacuum Science & Technology B, 15(6), 2702, 1997 |
| 2 |
100 kv Electron-Beam Lithography Using a Schottky Field-Emission Source Koek BH, Chisholm T, Somers J, Davey J, Romijn J, Vonrun AJ Journal of Vacuum Science & Technology B, 12(6), 3409, 1994 |