검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Characterization of titanium nitride etch rate and selectivity to silicon dioxide in a Cl-2 helicon-wave plasma Chiu HK, Lin TL, Hu Y, Leou KC, Lin HC, Tsai MS, Huang TY Journal of Vacuum Science & Technology A, 19(2), 455, 2001 |
| 2 |
Simple catalytic cell for restoring He leak detector sensitivity on vacuum systems with high D-2 backgrounds Busath J, Chiu HK Journal of Vacuum Science & Technology A, 17(4), 2015, 1999 |