화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Negative cesium sputter ion source for generating cluster primary ion beams for secondary ion mass spectrometry analysis
Gillen G, King L, Freibaum B, Lareau R, Bennett J, Chmara F
Journal of Vacuum Science & Technology A, 19(2), 568, 2001
2 Development of a triplasmatron ion source for the generation of SF5+ and F- primary ion beams on an ion microscope secondary ion mass spectrometry instrument
Gillen G, King RL, Chmara F
Journal of Vacuum Science & Technology A, 17(3), 845, 1999