검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Low-Energy Electron-Enhanced Etching of GaN/Si in Hydrogen Direct-Current Plasma Gillis HP, Choutov DA, Martin KP, Pearton SJ, Abernathy CR Journal of the Electrochemical Society, 143(11), L251, 1996 |
| No. | Article |
|---|---|
| 1 |
Low-Energy Electron-Enhanced Etching of GaN/Si in Hydrogen Direct-Current Plasma Gillis HP, Choutov DA, Martin KP, Pearton SJ, Abernathy CR Journal of the Electrochemical Society, 143(11), L251, 1996 |