검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Transient temperature measurements of resist heating using nanothermocouples Chu DC, Wong WK, Goodson KE, Pease RFW Journal of Vacuum Science & Technology B, 21(6), 2985, 2003 |
| 2 |
Submicron thermocouple measurements of electron-beam resist heating Chu DC, Bilir DT, Pease RFW, Goodson KE Journal of Vacuum Science & Technology B, 20(6), 3044, 2002 |
| 3 |
Thermal conductivity measurements of thin-film resist Chu DC, Touzelbaev M, Goodson KE, Babin S, Pease RF Journal of Vacuum Science & Technology B, 19(6), 2874, 2001 |