검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
X-ray photoemission spectroscopy study of silicidation of Ti on BF2+-implanted polysilicon Chua HN, Pey KL, Lai WH, Chai JW, Pan JS, Chua DHC, Siah SY Journal of Vacuum Science & Technology B, 19(6), 2252, 2001 |
| 2 |
Effect of BF2+ implantation on void formation in Ti-salicided narrow polysilicon lines Pey KL, Chua HN, Siah SY Electrochemical and Solid State Letters, 3(9), 442, 2000 |