검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
GaN focused ion beam micromachining with gas-assisted etching Chyr I, Steckl AJ Journal of Vacuum Science & Technology B, 19(6), 2547, 2001 |
| 2 |
Focused ion beam micromilling of GaN and related substrate materials (sapphire, SiC, and Si) Steckl AJ, Chyr I Journal of Vacuum Science & Technology B, 17(2), 362, 1999 |
| 3 |
Rare earth focused ion beam implantation utilizing Er and Pr liquid alloy ion sources Chao LC, Lee BK, Chi CJ, Cheng J, Chyr I, Steckl AJ Journal of Vacuum Science & Technology B, 17(6), 2791, 1999 |
| 4 |
Damage generation and removal in the Ga+ focused ion beam micromachining of GaN for photonic applications Chyr I, Lee B, Chao LC, Steckl AJ Journal of Vacuum Science & Technology B, 17(6), 3063, 1999 |