검색결과 : 1건
No. | Article |
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1 |
Aqueous solution-gel preparation of ultrathin ZrO2 films for gate dielectric application Hardy A, Van Elshocht S, Adelmann C, Conard T, Franquet A, Douheret O, Haeldermans I, D'Haen J, De Gendt S, Caymax M, Heyns M, D'Olieslaeger M, Van Bael MK, Mullens J Thin Solid Films, 516(23), 8343, 2008 |