검색결과 : 5건
| No. | Article |
|---|---|
| 1 |
Electromigration in AlCu lines: comparison of Dual Damascene and metal reactive ion etching Filippi RG, Gribelyuk MA, Joseph T, Kane T, Sullivan TD, Clevenger LA, Costrini G, Gambino J, Iggulden RC, Kiewra EW, Ning XJ, Ravikumar R, Schnabel RF, Stojakovic G, Weber SJ, Gignac LM, Hu CK, Rath DL, Rodbell KP Thin Solid Films, 388(1-2), 303, 2001 |
| 2 |
Temperature dependence of the Al-fill processes for submicron-via structures Weber SJ, Iggulden RC, Schnabel RF, Weigand P, Restaino DD, Brodsky SB, Mehter EA, Clevenger LA Thin Solid Films, 320(1), 63, 1998 |
| 3 |
Formation of a Crystalline Metal-Rich Silicide in Thin-Film Titanium/Silicon Reactions Clevenger LA, Cabral C, Roy RA, Lavoie C, Jordansweet J, Brauer S, Morales G, Ludwig KF, Stephenson GB Thin Solid Films, 289(1-2), 220, 1996 |
| 4 |
The C49 to C54 Phase-Transformation in TiSi2 Thin-Films Mann RW, Clevenger LA Journal of the Electrochemical Society, 141(5), 1347, 1994 |
| 5 |
Repeated Compressive Stress Increase with 400 Degrees-C Thermal Cycling in Tantalum Thin-Films Due to Increases in the Oxygen-Content Cabral C, Clevenger LA, Schad RG Journal of Vacuum Science & Technology B, 12(4), 2818, 1994 |