검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
High density plasma reactive ion etching of CoFeB magnetic thin films using a CH4/Ar plasma Kim EH, Lee TY, Min BC, Chung CW Thin Solid Films, 521, 216, 2012 |
| No. | Article |
|---|---|
| 1 |
High density plasma reactive ion etching of CoFeB magnetic thin films using a CH4/Ar plasma Kim EH, Lee TY, Min BC, Chung CW Thin Solid Films, 521, 216, 2012 |