검색결과 : 2건
No. | Article |
---|---|
1 |
Surface chemistry of thermal dry etching of cobalt thin films using hexafluoroacetylacetone (hfacH) Zhao J, Konh M, Teplyakov A Applied Surface Science, 455, 438, 2018 |
2 |
Metal-organic chemical vapour deposition of thin films of cobalt on different substrates: study of microstructure Paranjape MA, Mane AU, Raychaudhuri AK, Shalini K, Shivashankar SA, Chakravarty BR Thin Solid Films, 413(1-2), 8, 2002 |