검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Uniform Surface Oxidation of an Si Substrate by a Planar Modulated Inductively Coupled Thermal Plasma with Molecular Gas Feed Tial MKS, Tanaka Y, Maruyama Y, Tsuchiya T, Uesugi Y, Ishijima T Plasma Chemistry and Plasma Processing, 37(3), 857, 2017 |