검색결과 : 1건
No. | Article |
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1 |
A surface-micromachining-based inertial micro-switch with compliant cantilever beam as movable electrode for enduring high shock and prolonging contact time Xu Q, Yang ZQ, Fu B, Li JH, Wu H, Zhang QH, Sun YN, Ding GF, Zhao XL Applied Surface Science, 387, 569, 2016 |