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| No. | Article |
|---|---|
| 1 |
Supercritical CO2 reactor for wafer-scale thin film deposition: reactor concept, numerical results, and Cu depositio Kondoh E, Ueno T, Kurita S, Watanabe M, Yamamoto S, Suemasu T Journal of Supercritical Fluids, 104, 49, 2015 |