검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Semiempirical profile simulation of aluminum etching in Cl-2/BCl3 plasma Cooperberg DJ, Vahedi V, Gottscho RA Journal of Vacuum Science & Technology A, 20(5), 1536, 2002 |
| No. | Article |
|---|---|
| 1 |
Semiempirical profile simulation of aluminum etching in Cl-2/BCl3 plasma Cooperberg DJ, Vahedi V, Gottscho RA Journal of Vacuum Science & Technology A, 20(5), 1536, 2002 |