검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Predicting critical dimension uniformity in advanced electron-beam projection lithography masks Cotte EP, Mikkelson AR, Matesanz O, Engelstad RL, Lovell EG, Reu PL Journal of Vacuum Science & Technology B, 21(6), 3027, 2003 |
| 2 |
Dynamic studies of hard pellicle response during exposure scanning Cotte EP, Abdo AY, Engelstad RL, Lovell EG Journal of Vacuum Science & Technology B, 20(6), 2995, 2002 |