검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Remote plasma-enhanced chemical vapor deposition of SiO2 using Ar/N2O and SiH4 Courtney CH, Smith BC, Lamb HH Journal of the Electrochemical Society, 145(11), 3957, 1998 |
| 2 |
Plasma enhanced selective area microcrystalline silicon deposition on hydrogenated amorphous silicon : Surface modification for controlled nucleation Smith LL, Read WW, Yang CS, Srinivasan E, Courtney CH, Lamb HH, Parsons GN Journal of Vacuum Science & Technology A, 16(3), 1316, 1998 |