검색결과 : 5건
No. | Article |
---|---|
1 |
Monolithic multichannel secondary electron detector for distributed axis electron beam lithography and inspection Pickard DS, Kenney C, Tanimoto S, Crane T, Groves T, Pease RFW Journal of Vacuum Science & Technology B, 25(6), 2277, 2007 |
2 |
Distributed axis electron beam technology for maskless lithography and defect inspection Pickard DS, Groves TR, Meisburger WD, Crane T, Pease RF Journal of Vacuum Science & Technology B, 21(6), 2834, 2003 |
3 |
Distributed axis electron-beam system for lithography and inspection - preliminary experimental results Pickard DS, Campbell C, Crane T, Cruz-Rivera LJ, Davenport A, Meisburger WD, Pease RFW, Groves TR Journal of Vacuum Science & Technology B, 20(6), 2662, 2002 |
4 |
Correcting for global space charge by positive ion generation Crane T, Campbell C, Pickard D, Han LQ, Takahashi K, Meisburger WD, Pease RF Journal of Vacuum Science & Technology B, 20(6), 2709, 2002 |
5 |
Soul-Searching - Human-Nature and Supernatural Belief, by N. Humphrey Crane T Nature, 379(6567), 685, 1996 |