화학공학소재연구정보센터
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No. Article
1 Monolithic multichannel secondary electron detector for distributed axis electron beam lithography and inspection
Pickard DS, Kenney C, Tanimoto S, Crane T, Groves T, Pease RFW
Journal of Vacuum Science & Technology B, 25(6), 2277, 2007
2 Distributed axis electron beam technology for maskless lithography and defect inspection
Pickard DS, Groves TR, Meisburger WD, Crane T, Pease RF
Journal of Vacuum Science & Technology B, 21(6), 2834, 2003
3 Distributed axis electron-beam system for lithography and inspection - preliminary experimental results
Pickard DS, Campbell C, Crane T, Cruz-Rivera LJ, Davenport A, Meisburger WD, Pease RFW, Groves TR
Journal of Vacuum Science & Technology B, 20(6), 2662, 2002
4 Correcting for global space charge by positive ion generation
Crane T, Campbell C, Pickard D, Han LQ, Takahashi K, Meisburger WD, Pease RF
Journal of Vacuum Science & Technology B, 20(6), 2709, 2002
5 Soul-Searching - Human-Nature and Supernatural Belief, by N. Humphrey
Crane T
Nature, 379(6567), 685, 1996