검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Extraction of roughness parameters at nanometer scale by Monte Carlo simulation of Critical Dimension Scanning Electron Microscopy Ciappa M, Ilgunsatiroglu E, Illarionov AY Solid-State Electronics, 113, 73, 2015 |
| No. | Article |
|---|---|
| 1 |
Extraction of roughness parameters at nanometer scale by Monte Carlo simulation of Critical Dimension Scanning Electron Microscopy Ciappa M, Ilgunsatiroglu E, Illarionov AY Solid-State Electronics, 113, 73, 2015 |