검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
D-SIMS and ToF-SIMS quantitative depth profiles comparison on ultra thin oxynitrides Bersani M, Giubertoni D, Barozzi M, Elacob E, Vanzetti L, Anderle M, Lazzeri P, Crivelli B, Zanderigo F Applied Surface Science, 203, 281, 2003 |
| 2 |
High quality thin oxynitride by RTP annealing of in situ steam generation oxides for flash memory applications Brazzelli D, Ghidini G, Crivelli B, Zonca R, Bersani M Solid-State Electronics, 45(8), 1271, 2001 |
| 3 |
Nitridation of thin gate or tunnel oxides by nitric oxide Gerardi C, Zonca R, Crivelli B, Alessandri M Journal of the Electrochemical Society, 146(8), 3058, 1999 |