검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Application of a toroidal plasma source to TiN thin film deposition Zhang BC, Cross RC Journal of Vacuum Science & Technology A, 16(4), 2016, 1998 |
| No. | Article |
|---|---|
| 1 |
Application of a toroidal plasma source to TiN thin film deposition Zhang BC, Cross RC Journal of Vacuum Science & Technology A, 16(4), 2016, 1998 |