검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Deep trench etch and clean process technology for CU/SiOC passive device Yu MB, Bliznetsov VN, Chang CK, Murthy BR Thin Solid Films, 462-63, 302, 2004 |
| No. | Article |
|---|---|
| 1 |
Deep trench etch and clean process technology for CU/SiOC passive device Yu MB, Bliznetsov VN, Chang CK, Murthy BR Thin Solid Films, 462-63, 302, 2004 |